Ink jet recording device and manufacture of ink jet head



(57)【要約】 【目的】 小型高密度、信頼性及び量産性のあるインク ジェット記録装置及びそのヘッドの製造法を得る。 【構成】 少なくとも3枚の基板1,2,3を積層し、 中間基板2には複数のノズル孔4と、該ノズル孔の各々 に連通する複数の独立の吐出室6と、該吐出室の少なく とも一方の壁の一部が機械的変形を起こすようになって いる振動板5と、吐出室にインクを供給する共通のイン クキャビティ8を形成し、振動板5の駆動手段として、 下基板3に電極31を形成して該振動板を静電気力によ り変形させ、ノズル孔よりインク液滴13を吐出させ る。
PURPOSE:To obtain an ink jet recording device having a small size, a highly compact structure, reliability and mass productivity, and a method of producing a head therefor. CONSTITUTION:At least three base plates 1, 2, 3 are laminated on one another. The intermediate base plate 2 comprises a plurality of nozzle holes 4, a plurality of independent discharge chamber 6 each communicating with each of the nozzle holes 4, a diaphragm 5 forming a part of at least one of the walls of each discharge chamber 6 so as to be mechanically deformed, and a common ink cavity 8 for feeding ink to each discharge chamber 6. Electrodes 31 are formed on the lower base plate 3 as driving means for the diaphragms 5 to deform the diaphragms 5 by a static electric force, and ink droplets are thereby jetted from the nozzle holes.




Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)


Cited By (30)

    Publication numberPublication dateAssigneeTitle
    EP-0933213-A1August 04, 1999Seiko Epson CorporationAppareil d'impression à jet d'encre et méthode pour contrÔler celui-ci
    EP-1645415-A2April 12, 2006Seiko Epson CorporationTête d'éjection de gouttelettes, son procédé de fabrication et dispositif d'éjection de gouttelettes
    JP-2006147945-AJune 08, 2006Seiko Epson Corp, セイコーエプソン株式会社Etching liquid and its production process, and manufacturing process of liquid ejection head
    JP-2008062546-AMarch 21, 2008Seiko Epson Corp, セイコーエプソン株式会社液滴吐出ヘッド、液滴吐出ヘッドの駆動方法、及び液滴吐出装置
    JP-4552615-B2September 29, 2010セイコーエプソン株式会社液体噴射ヘッドの製造方法
    US-5894316-AApril 13, 1999Seiko Epson CorporationInk jet head with diaphragm having varying compliance or stepped opposing wall
    US-6000785-ADecember 14, 1999Seiko Epson CorporationInk jet head, a printing apparatus using the ink jet head, and a control method therefor
    US-6190003-B1February 20, 2001Seiko Epson CorporationElectrostatic actuator and manufacturing method therefor
    US-6309056-B1October 30, 2001Minolta Co., Ltd.Ink jet head, drive method of ink jet head, and ink jet recording apparatus
    US-6332669-B1December 25, 2001Ricoh Company, Ltd.Ink jet head including vibration plate and electrode substrate
    US-6341847-B1January 29, 2002Ricoh Company, Ltd.Electrostatic inkjet head having an accurate gap between an electrode and a diaphragm and manufacturing method thereof
    US-6354697-B1March 12, 2002Ricoh Company, Ltd.Electrostatic typeinkjet head having a vent passage and a manufacturing method thereof
    US-6375858-B1April 23, 2002Seiko Epson CorporationMethod of forming nozzle for injection device and method of manufacturing inkjet head
    US-6394586-B2May 28, 2002Ricoh Company, Ltd.Liquid droplet discharging head and ink jet recording device
    US-6406133-B1June 18, 2002Ricoh Company, Ltd.Electrostatic ink jet head and method of producing the same
    US-6410107-B2June 25, 2002Seiko Epson CorporationMethods for manufacturing an electrostatic actuator
    US-6454395-B1September 24, 2002Ricoh Company, Ltd.Electrostatic inkjet head and manufacturing method thereof
    US-6491378-B2December 10, 2002Seiko Epson CorporationInk jet head, ink jet printer, and its driving method
    US-6568794-B2May 27, 2003Ricoh Company, Ltd.Ink-jet head, method of producing the same, and ink-jet printing system including the same
    US-6578950-B2June 17, 2003Fuji Photo Film Co., Ltd.Line head and image recording method
    US-6774021-B2August 10, 2004Fuji Photo Film Co., Ltd.Pattern forming method and pattern forming device
    US-6863375-B2March 08, 2005Seiko Epson CorporationEjection device and inkjet head with silicon nozzle plate
    US-7033002-B2April 25, 2006Ricoh Company, Ltd.Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes
    US-7052101-B2May 30, 2006Fuji Photo Film Co., Ltd.Supply for image recording apparatus, method of determining the same and method of manufacturing the same
    US-7226150-B2June 05, 2007Hitachi, Ltd., Ricoh Printing Systems Co., Ltd.Inkjet head and a method of manufacturing the same
    US-7651197-B2January 26, 2010Ricoh Printing Systems, Ltd.Method of manufacturing an inkjet head through the anodic bonding of silicon members
    US-7745307-B2June 29, 2010Ricoh Printing Systems, Ltd.Method of manufacturing an inkjet head through the anodic bonding of silicon members
    US-8079673-B2December 20, 2011Ricoh Company, Ltd.Droplet discharging head, liquid cartridge, droplet discharging device, and image formation apparatus, configured with additional flow path connecting commom liquid chamber and liquid flow paths
    WO-03097364-A1November 27, 2003Ricoh Company, Ltd.Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes
    WO-9851506-A1November 19, 1998Seiko Epson CorporationProcede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre