Ink jet recording device and manufacture of ink jet head

インクジエツト記録装置及びインクジエツトヘツドの製造方法

Abstract

(57)【要約】 【目的】 小型高密度、信頼性及び量産性のあるインク ジェット記録装置及びそのヘッドの製造法を得る。 【構成】 少なくとも3枚の基板1,2,3を積層し、 中間基板2には複数のノズル孔4と、該ノズル孔の各々 に連通する複数の独立の吐出室6と、該吐出室の少なく とも一方の壁の一部が機械的変形を起こすようになって いる振動板5と、吐出室にインクを供給する共通のイン クキャビティ8を形成し、振動板5の駆動手段として、 下基板3に電極31を形成して該振動板を静電気力によ り変形させ、ノズル孔よりインク液滴13を吐出させ る。
PURPOSE:To obtain an ink jet recording device having a small size, a highly compact structure, reliability and mass productivity, and a method of producing a head therefor. CONSTITUTION:At least three base plates 1, 2, 3 are laminated on one another. The intermediate base plate 2 comprises a plurality of nozzle holes 4, a plurality of independent discharge chamber 6 each communicating with each of the nozzle holes 4, a diaphragm 5 forming a part of at least one of the walls of each discharge chamber 6 so as to be mechanically deformed, and a common ink cavity 8 for feeding ink to each discharge chamber 6. Electrodes 31 are formed on the lower base plate 3 as driving means for the diaphragms 5 to deform the diaphragms 5 by a static electric force, and ink droplets are thereby jetted from the nozzle holes.

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